|
|
|
Seimconductor Physics Research Laboratory |
Department of Physics, Chulalongkorn University |
Bangkok, THAILAND |
|
|
|
DC & RF Sputtering System (4" gun) |
|
|
The Leybold Univex 350 is installed with a 4" magnetron gun. It is used for fabricating the metal back-contact and a window layer of the CIGS-based thin film solar cells with a substrate size up to 10cm x 10cm. |
|
|